A review of recent work in sub-nanometre displacement measurement using optical and X-ray interferometry.
作者信息
Peggs G N, Yacoot A
机构信息
Centre for Basic, Thermal and Length Metrology, National Physical Laboratory, Queens Road, Teddington TW11 0LW, UK.
出版信息
Philos Trans A Math Phys Eng Sci. 2002 May 15;360(1794):953-68. doi: 10.1098/rsta.2001.0976.
PMID:12804288
Abstract
This paper reviews recent work in the field of displacement measurement using optical and X-ray interferometry at the sub-nanometre level of accuracy. The major sources of uncertainty in optical interferometry are discussed and a selection of recent designs of ultra-precise, optical-interferometer-based, displacement measuring transducers presented. The use of X-ray interferometry and its combination with optical interferometry is discussed.
摘要
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