Fabrication of ordered arrays of InP microstructures by wet chemical etching with Au masks.

作者信息

Su G, Guo Q, Palmer R E

机构信息

Nanoscale Physics Research Laboratory, School of Physics and Astronomy, University of Birmingham, Edgbaston, Birmingham B15 2TT, United Kingdom.

出版信息

J Nanosci Nanotechnol. 2002 Dec;2(6):627-30. doi: 10.1166/153348802321105905.

DOI:10.1166/153348802321105905

PMID:12908426

Abstract

Ordered arrays of InP microstructures have been fabricated on InP(001) substrates by wet chemical etching in aqueous HCl with patterned Au masks. The masks were produced by Au deposition through copper grids or a monolayer of polystyrene microspheres. Square InP mesas (20 x 20 microns) and pillars (approximately 100 nm in both diameter and height) were both produced and characterized by scanning electron microscopy and atomic force microscopy.

摘要