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用于具有含铬波导结构的沟道波导和布拉格光栅的紫外激光写入的光敏GeO2-SiO2薄膜。

Photosensitive GeO2-SiO2 films for ultraviolet laser writing of channel waveguides and bragg gratings with Cr-loaded waveguide structure.

作者信息

Takahashi Masahide, Sakoh Akifumi, Ichii Kentaro, Tokuda Yomei, Yoko Toshinobu, Nishii Junji

机构信息

Institute for Chemical Research, Kyoto University, Uji, Kyoto 611-0011, Japan.

出版信息

Appl Opt. 2003 Aug 1;42(22):4594-8. doi: 10.1364/ao.42.004594.

DOI:10.1364/ao.42.004594
PMID:12916627
Abstract

Irradiation with intense ultraviolet laser pulses induced a large refractive-index change in 30GeO2-70SiO2 waveguide-grade thin films prepared by the plasma-enhanced chemical vapor deposition method, which contained a large amount of photoactive Ge2+ defects. The maximum index change in the as-deposited films by KrF and XeF excimer laser irradiation was estimated to be 1.2 x 10(-3) and 0.28 x 10(-3), respectively. These results clearly indicate that the photorefractivity of GeO2-SiO2 glasses is due to a Ge2+ defect in origin. The channel waveguide and the planar Bragg gratings were directly written in the photoactive Ge(2+)-enriched GeOs-SiO2 thin films by pulsed ultraviolet laser irradiation with a Cr-metal-loaded-type waveguide structure.

摘要

用强紫外激光脉冲辐照通过等离子体增强化学气相沉积法制备的30GeO2 - 70SiO2波导级薄膜时,在其中含有大量光活性Ge2 +缺陷的薄膜中诱导出了大的折射率变化。通过KrF和XeF准分子激光辐照,沉积态薄膜中的最大折射率变化估计分别为1.2×10(-3)和0.28×10(-3)。这些结果清楚地表明,GeO2 - SiO2玻璃的光折变特性起源于Ge2 +缺陷。通过具有Cr金属负载型波导结构的脉冲紫外激光辐照,在富含光活性Ge(2 +)的GeOs - SiO2薄膜中直接写入了通道波导和平面布拉格光栅。

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