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碰撞射频鞘层中尘埃颗粒的感应电势

Induced potential of a dust particle in a collisional radio-frequency sheath.

作者信息

Hou Lu-Jing, Wang You-Nian, Misković Z L

机构信息

State Key Lab of Materials Modification by Beams, Department of Physics, Dalian University of Technology, Dalian 116023, China.

出版信息

Phys Rev E Stat Nonlin Soft Matter Phys. 2003 Jul;68(1 Pt 2):016410. doi: 10.1103/PhysRevE.68.016410. Epub 2003 Jul 24.

Abstract

A hydrodynamic model is established to study the interactions of a dust particle with a radio-frequency (rf) sheath, taking into account the influence of the spatial inhomogeneity of the (rf) sheath, as well as the influence of the ion-neutral collisions. Numerical results are obtained for the charge on the dust particle and for the spatial distribution of the induced potential around this particle, based on a self-consistent modeling of the sheath parameters such as the sheath electric field, the ion velocity, and the ion and electron densities. The induced potential exhibits the familiar oscillatory structure of a wake potential, which is, however, strongly damped due to the collisional effects. The spatial inhomogeneity of the rf sheath gives rise to a further damping of the induced potential, as well as to a reduction of the oscillations at large distances from the dust particle.

摘要

建立了一个流体动力学模型,以研究尘埃颗粒与射频(rf)鞘层的相互作用,其中考虑了(rf)鞘层空间不均匀性的影响以及离子 - 中性碰撞的影响。基于对鞘层参数(如鞘层电场、离子速度以及离子和电子密度)的自洽建模,获得了尘埃颗粒上的电荷以及该颗粒周围感应电势的空间分布的数值结果。感应电势呈现出尾流电势常见的振荡结构,然而,由于碰撞效应,该结构受到强烈阻尼。rf鞘层的空间不均匀性导致感应电势进一步衰减,同时也使远离尘埃颗粒处的振荡减少。

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