Dai Zhong-Ling, Wang You-Nian, Ma Teng-Cai
Department of Physics, Dalian University of Technology, Dalian 116023, People's Republic of China.
Phys Rev E Stat Nonlin Soft Matter Phys. 2002 Mar;65(3 Pt 2B):036403. doi: 10.1103/PhysRevE.65.036403. Epub 2002 Feb 13.
A self-consistent fluid model is proposed for describing collisionless radio-frequency (rf) sheaths driven by a sinusoidal current source. This model includes all time-dependent terms in ion fluid equations, which are commonly ignored in some analytical models and numerical simulations. Moreover, an equivalent circuit model is introduced to determine self-consistently the relationship between the instantaneous potential at a rf-biased electrode and the sheath thickness. The time-dependent voltage wave form, the sheath thickness and the ion flux at the electrode as well as the spatiotemporal variations of the potential, the electric field and the ion density inside the sheath are calculated for various rf powers and ratios of the rf frequency to the ion plasma frequency. The ion energy distributions ( IEDs) impinging on the rf-biased electrode are also calculated with the ion flux at the electrode. The numerical results show that the frequency ratio is a crucial parameter determining the spatiotemporal variations of the rf sheath and the shape of the IEDs.
提出了一种自洽流体模型，用于描述由正弦电流源驱动的无碰撞射频（rf）鞘层。该模型包含离子流体方程中所有与时间相关的项，而这些项在一些解析模型和数值模拟中通常被忽略。此外，引入了一个等效电路模型，以自洽地确定射频偏置电极处的瞬时电位与鞘层厚度之间的关系。针对各种射频功率以及射频频率与离子等离子体频率的比值，计算了随时间变化的电压波形、鞘层厚度、电极处的离子通量以及鞘层内部电位、电场和离子密度的时空变化。还根据电极处的离子通量计算了撞击射频偏置电极的离子能量分布（IED）。数值结果表明，频率比是决定射频鞘层时空变化和IED形状的关键参数。
