Huang Wei-dong, Zhan Ru-juan
Structure Research Laboratory, Chinese Academy of Sciences, Department of Modern Physics, University of Science and Technology of China, Hefei 230026, China.
Guang Pu Xue Yu Guang Pu Fen Xi. 2003 Jun;23(3):512-4.
Raman spectrum and X-ray photoelectron spectroscopy (XPS) were used for the structural analysis of diamond-like carbon (DLC) film deposited by surface wave plasma. Decomposition methods were used respectively to achieve the quantitative measurement of sp3 content of the films deposited under different working times. We obtained the result that the sp3 bonding of the films was in the range of 20%-40% and increased with the depositing time by using both analysis methods.
拉曼光谱和X射线光电子能谱（XPS）被用于对通过表面波等离子体沉积的类金刚石碳（DLC）薄膜进行结构分析。分别采用分解方法来实现对在不同工作时间下沉积的薄膜中sp3含量的定量测量。通过这两种分析方法，我们得到的结果是，薄膜的sp3键合在20%-40%的范围内，并且随着沉积时间的增加而增加。
