Ozeki K, Masuzawa T, Hirakuri K K
Department of Mechanical Engineering, Ibaraki University, Ibaraki, Japan.
Biomed Mater Eng. 2010;20(1):21-35. doi: 10.3233/BME-2010-0612.
Diamond-like carbon (DLC) films were deposited on stainless steel (SUS), titanium (Ti) and nickel titanium (Ni-Ti) substrates using a radiofrequency plasma chemical vapour deposition method. Prior to DLC coating, the substrates were exposed to O2 and N2 plasma to enhance the adhesion strength of the DLC film to the substrate. After the plasma pre-treatment, the chemical composition and the wettability of the substrate surface was investigated by X-ray photoelectron spectroscopy (XPS) and water contact angle measurement, respectively. A pull-out test and a ball-on-disc test were carried out to evaluate the adhesion strength and the wear properties of the DLC-coated substrates. The XPS results showed that the N2 and O2 plasma pre-treatment produced nitride and oxide on the substrate surfaces, such as TiO2, TiO, Fe2O3, CrN and TiNO. In the pull-out test, the adhesion strengths of the DLC film to the SUS, Ti and Ni-Ti substrates were improved with the plasma pre-treatment. In the ball-on-disc test, the DLC coated SUS, Ti and Ni-Ti substrates without the plasma pre-treatment showed severe film failure following the test. The DLC coated SUS and Ni-Ti substrates with the N2 plasma pre-treatment showed good wear resistance, compared with that with the O2 plasma pre-treatment.
采用射频等离子体化学气相沉积法在不锈钢（SUS）、钛（Ti）和镍钛（Ni-Ti）基底上沉积类金刚石碳（DLC）薄膜。在进行DLC涂层之前，将基底暴露于氧气和氮气等离子体中，以提高DLC薄膜与基底之间的附着强度。等离子体预处理后，分别通过X射线光电子能谱（XPS）和水接触角测量研究了基底表面的化学成分和润湿性。进行了拉拔试验和球盘试验，以评估DLC涂层基底的附着强度和磨损性能。XPS结果表明，氮气和氧气等离子体预处理在基底表面产生了氮化物和氧化物，如TiO2、TiO、Fe2O3、CrN和TiNO。在拉拔试验中，经过等离子体预处理后，DLC薄膜与SUS、Ti和Ni-Ti基底之间的附着强度得到了提高。在球盘试验中，未经等离子体预处理的DLC涂层SUS、Ti和Ni-Ti基底在试验后出现了严重的薄膜失效。与氧气等离子体预处理相比，经过氮气等离子体预处理的DLC涂层SUS和Ni-Ti基底表现出良好的耐磨性。
