Fu S W, Power J F
Department of Chemistry, McGill University, 801 Sherbrooke St. W., Montreal, Qc, H3A 2K6 Canada.
Appl Spectrosc. 2004 Jan;58(1):96-104. doi: 10.1366/000370204322729522.
Light profile microscopy (LPM) is a recently developed technique of optical inspection that is used to record micrometer scale images of thin film cross-sections on a direct basis. This technique uses a novel right-angle imaging geometry that shows outstanding contrast for subtle interface structures and morphologies that are invisible to conventional methods of inspection. When laser sources are used for sample illumination, image contrast is provided by luminescence and elastic and/or inelastic scatter. When a white-light excitation source is used for LPM, primary contrast is obtained from elastic scatter, while secondary contrast results from refraction, secondary transmission, and secondary reflection from material phases. We term this mode of inspection broadband light profile microscopy (BB-LPM). It is implemented with a compact, easily aligned apparatus and minimal sample preparation, and it shows outstanding interface contrast similar to laser LPM. In this work we demonstrate BB-LPM as a method for direct imaging of the layers structures of a variety of thin film samples of industrial and manufacturing interest.
光轮廓显微镜（LPM）是一种最近开发的光学检测技术，用于直接记录薄膜横截面的微米级图像。该技术采用了一种新颖的直角成像几何结构，对于传统检测方法不可见的细微界面结构和形态具有出色的对比度。当使用激光源照射样品时，图像对比度由发光以及弹性和/或非弹性散射提供。当使用白光激发源进行LPM时，主要对比度来自弹性散射，而次要对比度则来自材料相的折射、二次透射和二次反射。我们将这种检测模式称为宽带光轮廓显微镜（BB-LPM）。它通过紧凑、易于对准的设备和最少的样品制备来实现，并且显示出与激光LPM相似的出色界面对比度。在这项工作中，我们展示了BB-LPM作为一种对各种具有工业和制造意义的薄膜样品的层结构进行直接成像的方法。
