Kovacs G T, Storment C W, Rosen J M
Department of Electrical Engineering, Center for Integrated Systems, Stanford University, CA 94305.
IEEE Trans Biomed Eng. 1992 Sep;39(9):893-902. doi: 10.1109/10.256422.
A microelectrode array capable of recording from and stimulating peripheral nerves at prolonged intervals after surgical implantation has been demonstrated. The microelectrode array, fabricated on a silicon substrate perforated by multiple holes (referred to as via holes), is implanted between the ends of a surgically severed nerve. Regenerating tissue fixes the device in place to provide a stable mapping between the microelectrodes and the axons in the nerve. Processes were developed for the fabrication of thin-film iridium microelectrodes, micromachined via holes, and silicon nitride passivation layers. All fabrication methods were designed to be compatible with standard CMOS/BiCMOS processes to allow for on-chip signal processing circuits in future designs. Such arrays, implanted in the peroneal nerves of rats, were used to record from and stimulate the nerves at up to 13 months postoperatively.
已经证明了一种微电极阵列，在手术植入后能够长时间记录和刺激周围神经。该微电极阵列制作在有多个孔（称为通孔）的硅基片上，植入到手术切断的神经两端之间。再生组织将该装置固定到位，以在微电极和神经中的轴突之间提供稳定的映射。开发了用于制造薄膜铱微电极、微机械加工通孔和氮化硅钝化层的工艺。所有制造方法都设计为与标准CMOS/BiCMOS工艺兼容，以便在未来设计中实现片上信号处理电路。将这种阵列植入大鼠的腓神经中，用于在术后长达13个月的时间里记录和刺激神经。
