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透射电子显微镜中用于表面研究的反射电子能量损失谱学与成像

Reflection electron energy-loss spectroscopy and imaging for surface studies in transmission electron microscopes.

作者信息

Wang Z L, Bentley J

机构信息

Metals and Ceramics Division, Oak Ridge National Laboratory, Tennessee 37831-6376.

出版信息

Microsc Res Tech. 1992 Feb 15;20(4):390-405. doi: 10.1002/jemt.1070200409.

Abstract

A review is given on the techniques and applications of high-energy reflection electron energy-loss spectroscopy (REELS) and reflection electron microscopy (REM) for surface studies in scanning transmission electron microscopes (STEM) and conventional transmission electron microscopes (TEM). A diffraction method is introduced to identify a surface orientation in the geometry of REM. The surface dielectric response theory is presented and applied for studying alpha-alumina surfaces. Domains of the alpha-alumina (012) surface initially terminated with oxygen can be reduced by an intense electron beam to produce Al metal; the resistance to beam damage of surface domains initially terminated with Al+3 ions is attributed to the screening effect of adsorbed oxygen. Surface energy-loss near-edge structure (ELNES), extended energy-loss fine structure (EXELFS), and microanalysis using REELS are illustrated based on the studies of TiO2 and MgO. Effects of surface resonances (or channeling) on the REELS signal-to-background ratio are described. The REELS detection of a monolayer of oxygen adsorption on diamond (111) surfaces is reported. It is shown that phase contrast REM image content can be significantly increased with the use of a field emission gun (FEG). Phase contrast effects close to the core of a screw dislocation are discussed and the associated Fresnel fringes around a surface step are observed. Finally, an in situ REM experiment is described for studying atomic desorption and diffusion processes on alpha-alumina surfaces at temperatures of 1,300-1,400 degrees C.

摘要

综述了高能反射电子能量损失谱(REELS)和反射电子显微镜(REM)在扫描透射电子显微镜(STEM)和传统透射电子显微镜(TEM)中用于表面研究的技术及应用。介绍了一种衍射方法以在REM几何结构中确定表面取向。提出了表面介电响应理论并将其应用于研究α-氧化铝表面。最初以氧终止的α-氧化铝(012)表面的区域可通过强电子束还原以生成铝金属;最初以Al+3离子终止的表面区域对束损伤的抗性归因于吸附氧的屏蔽效应。基于对TiO2和MgO的研究,说明了表面能量损失近边结构(ELNES)、扩展能量损失精细结构(EXELFS)以及使用REELS进行的微分析。描述了表面共振(或沟道效应)对REELS信背比的影响。报道了在金刚石(111)表面上单层氧吸附的REELS检测。结果表明,使用场发射枪(FEG)可显著增加相衬REM图像的内容。讨论了靠近螺旋位错核心的相衬效应,并观察到表面台阶周围相关的菲涅耳条纹。最后,描述了一个原位REM实验,用于研究在1300 - 1400摄氏度温度下α-氧化铝表面的原子解吸和扩散过程。

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