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用于微电子封装的高频超声复合振动系统的配置

Configurations of high-frequency ultrasonics complex vibration systems for packaging in microelectronics.

作者信息

Tsujino Jiromaru, Harada Yoshiki, Ihara Shigeru, Kasahara Kohei, Shimizu Masanori, Ueoka Tetsugi

机构信息

Faculty of Engineering, Kanagawa University, 3-27-1 Rokkakubashi, Kanagawa-ku, Yokohama 221-8686, Japan.

出版信息

Ultrasonics. 2004 Apr;42(1-9):125-9. doi: 10.1016/j.ultras.2004.02.011.

DOI:10.1016/j.ultras.2004.02.011
PMID:15047273
Abstract

Ultrasonic high-frequency complex vibrations are effective for various ultrasonic high-power applications. Three types of ultrasonic complex vibration system with a welding tip vibrating elliptical to circular locus for packaging in microelectronics were studied. The complex vibration sources are using (1) a longitudinal-torsional vibration converter with diagonal slits that is driven only by a longitudinal vibration source, (2) a complex transverse vibration rod with several stepped parts that is driven by two longitudinal vibration source crossed at a right angle and (3) a longitudinal vibration circular disk and three longitudinal transducers that are installed at the circumference of the disk.

摘要

超声高频复合振动对各种超声高功率应用有效。研究了三种用于微电子封装的、焊头振动轨迹为椭圆形至圆形的超声复合振动系统。复合振动源使用:(1)一种带有对角缝的纵向-扭转振动换能器,仅由纵向振动源驱动;(2)一种带有多个阶梯部分的复合横向振动棒,由两个成直角交叉的纵向振动源驱动;(3)一个纵向振动圆盘和三个安装在圆盘圆周上的纵向换能器。

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