Dollinger G, Bergmaier A, Faestermann T, Frey C M
Technische Universität München, Physik-Department E12, D-85747, Garching, Germany.
Anal Bioanal Chem. 1995 Oct;353(3-4):311-5. doi: 10.1007/s0021653530311.
Elastic recoil detection (ERD) with energetic heavy ions (e.g. 60-120 MeV(127)I) is a suitable method to measure depth profiles of light and medium heavy elements in thin films. The advantages of this method are reliable and quantitative results and elementally and isotopically resolved depth profiles. A relative energy resolution of 0.07% has been measured in real ERD-experiments using the Q3D magnetic spectrograph at the Munich tandem accelerator and a large solid angle of detection of 5 msr. The good energy resolution allows atomic depth resolution near to the surface which has been obtained at flat and smooth carbon samples. A large solid angle of detection is necessary to measure a depth profile with the desired accuracy before the sample is significantly altered by the ion beam. As an example carbon profiles of thin carbon layers, prepared by a laser plasma ablation deposition process, have been investigated revealing the high depth resolution and its power to resolve elemental profiles at gradiated interfaces.
利用高能重离子（例如60 - 120 MeV的¹²⁷I）进行弹性反冲探测（ERD）是测量薄膜中轻元素和中重元素深度分布的一种合适方法。该方法的优点是结果可靠且定量，以及能得到元素和同位素分辨的深度分布。在慕尼黑串列加速器上使用Q3D磁谱仪进行的实际ERD实验中，已测得相对能量分辨率为0.07%，并且探测立体角大至5 msr。良好的能量分辨率使得在平坦光滑的碳样品上能够获得接近表面的原子深度分辨率。为了在样品被离子束显著改变之前以所需精度测量深度分布，大探测立体角是必要的。例如，对通过激光等离子体烧蚀沉积工艺制备的薄碳层的碳分布进行了研究，揭示了其高深度分辨率以及在渐变界面处分辨元素分布的能力。
