Cacialli F, Riehn Robert, Downes A, Latini G, Charas Ana, Morgado Jorge
Department of Physics, University College London, and London Centre for Nanotechnology, Gower Street, WC1E 6BT, London, UK.
Ultramicroscopy. 2004 Aug;100(3-4):449-55. doi: 10.1016/j.ultramic.2003.12.016.
We report our investigations into the fabrication of nanostructures of poly(p-phenylene vinylene) via direct scanning near-field lithography of its soluble precursor. Our technique is based on the spatially selective inhibition of the precursor solubility by exposure to the ultraviolet optical field present at the apex of commercially available, Au-coated near-field probes with aperture diameters between 40 and 80 nm (+/-5 nm). After development in methanol and thermal conversion under vacuum we obtain features with a minimum dimension of 160 nm. We analyse our results via tapping-mode atomic force microscopy, and find a clear phase contrast between the core and the centre of the lithographed features, corroborating the hypothesis that hard, fully insolubilised regions are surrounded by a gel-like phase, which we estimate of the order of 110-130 nm for the smallest features, by comparing our experiments with simulations carried out using a Bethe-Bouwkamp model. Use of such model also allows us to discuss the influence of probe size, tip-sample distance, and film thickness on the resolution of the lithographic process. We demonstrate the use of the technique for the direct writing of two-dimensional periodic structures with intentional defects and a periodicity relevant to applications in the visible range.
我们报告了通过对聚对苯撑乙烯的可溶性前体进行直接扫描近场光刻来制备其纳米结构的研究。我们的技术基于通过暴露于孔径直径在40至80纳米(±5纳米)之间的市售金涂层近场探针顶端存在的紫外光场,对前体溶解度进行空间选择性抑制。在甲醇中显影并在真空中进行热转化后,我们获得了最小尺寸为160纳米的特征。我们通过轻敲模式原子力显微镜分析结果,发现在光刻特征的核心和中心之间存在明显的相衬度,这证实了这样的假设:坚硬的、完全不溶的区域被凝胶状相包围,通过将我们的实验与使用贝塞尔 - 布坎普模型进行的模拟相比较,我们估计最小特征的凝胶状相的尺寸约为110 - 130纳米。使用这种模型还使我们能够讨论探针尺寸、针尖 - 样品距离和膜厚度对光刻工艺分辨率的影响。我们展示了该技术用于直接写入具有故意缺陷且具有与可见光范围内应用相关的周期性的二维周期性结构。