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用于金属基复合材料透射电子显微镜分析的聚焦离子束铣削特定部位样品制备

Site-specific specimen preparation by focused ion beam milling for transmission electron microscopy of metal matrix composites.

作者信息

Gasser Philippe, Klotz Ulrich E, Khalid Fazal A, Beffort Olivier

机构信息

Swiss Federal Institute for Materials Testing and Research (EMPA), Ueberlandstrasse 129, CH-8600 Duebendorf, Switzerland.

出版信息

Microsc Microanal. 2004 Apr;10(2):311-6. doi: 10.1017/S1431927604040413.

Abstract

This work describes the application and usefulness of the focused ion beam (FIB) technique for the preparation of transmission electron microscopy (TEM) samples from metal matrix composite materials. Results on an Aldiamond composite, manufactured by the squeeze casting infiltration process, were chosen for demonstration. It is almost impossible to prepare TEM specimens of this material by any other conventional method owing to the presence of highly inhomogeneous phases and reinforcement diamond particles. The present article gives a detailed account of the salient features of the FIB technique and its operation. One of the big advantages is the possibility to prepare site-specific TEM specimens with high spatial resolution. The artifacts occurring during the specimen preparation, for example, Ga-ion implantation, curtain effects, amorphous layers, bending of the lamella, or different milling behaviors of the materials have been discussed. Furthermore, TEM examination of the specimens prepared revealed an ultrafine amorphous layer of graphite formed at the interface between the Al and diamond particles that may affect the interfacial properties of the composite materials. This may not have been feasible without the successful application of the FIB technique for production of good quality site-specific TEM specimens.

摘要

这项工作描述了聚焦离子束(FIB)技术在制备金属基复合材料的透射电子显微镜(TEM)样品方面的应用及实用性。选用了通过挤压铸造渗透工艺制造的Aldiamond复合材料的结果进行展示。由于存在高度不均匀的相和增强金刚石颗粒,用任何其他传统方法制备这种材料的TEM标本几乎是不可能的。本文详细介绍了FIB技术的显著特点及其操作。其中一个很大的优点是能够制备具有高空间分辨率的特定位置的TEM标本。讨论了样品制备过程中出现的伪像,例如镓离子注入、幕帘效应、非晶层、薄片弯曲或材料的不同铣削行为。此外,对制备的样品进行TEM检查发现,在铝和金刚石颗粒之间的界面处形成了一层超细的石墨非晶层,这可能会影响复合材料的界面性能。如果没有成功应用FIB技术来生产高质量的特定位置的TEM标本,这可能是不可行的。

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