结合布里渊光谱和激光表面声波技术对厚类金刚石薄膜的弹性特性进行表征。

Combining Brillouin spectroscopy and laser-SAW technique for elastic property characterization of thick DLC films.

作者信息

Berezina Sofia, Zinin Pavel V, Schneider Dieter, Fei Dong, Rebinsky Douglas A

机构信息

School of Ocean and Earth Science and Technology, Hawaii Institute of Geophysics and Planetology, University of Hawaii, 2525 Correa Road, Honolulu, HI 96822-2219, USA.

出版信息

Ultrasonics. 2004 Dec;43(2):87-93. doi: 10.1016/j.ultras.2004.03.006.

DOI:10.1016/j.ultras.2004.03.006

PMID:15530982

Abstract

Surface Brillouin spectroscopy (SBS) has been widely used for elastic property characterization of thin films. For films thicker than 500 nm, however, the wavelength of surface acoustic wave in the frequency range available for SBS is smaller than film thickness, and the SBS measures only the Rayleigh wave of the film. The laser-SAW technique, on the other hand, measures only the low-frequency portion of the surface acoustic wave dispersion and can estimate only one elastic modulus of the film (typically Young's modulus). In this work, we have combined the two methods to determine both Young's modulus and Poisson's ratio of a diamond-like carbon (DLC) film. It was found that reasonable estimates can be obtained for the longitudinal wave velocity, shear wave velocity, and Young's modulus of the film. The Poisson's ratio, however, still has a relatively large measurement error.

摘要

表面布里渊光谱（SBS）已被广泛用于薄膜的弹性特性表征。然而，对于厚度超过500nm的薄膜，在SBS可用频率范围内的表面声波波长小于薄膜厚度，并且SBS仅测量薄膜的瑞利波。另一方面，激光-声表面波技术仅测量表面声波色散的低频部分，并且只能估计薄膜的一个弹性模量（通常是杨氏模量）。在这项工作中，我们将这两种方法结合起来以确定类金刚石碳（DLC）薄膜的杨氏模量和泊松比。结果发现，可以对薄膜的纵波速度、剪切波速度和杨氏模量获得合理的估计。然而，泊松比仍然具有相对较大的测量误差。