Knipping Jörg, Wiggers Hartmut, Rellinghaus Bernd, Roth Paul, Konjhodzic Denan, Meier Cedrik
Institut für Verbrennung und Gasdynamik, Universität Duisburg-Essen, D-47048 Duisburg, Germany.
J Nanosci Nanotechnol. 2004 Nov;4(8):1039-44. doi: 10.1166/jnn.2004.149.
The formation of pure single crystalline silicon nanoparticles by microwave induced decomposition of silane in a low pressure flow reactor is reported. The morphology and crystal structure of the particles are characterized in situ by particle mass spectrometry (PMS) and ex situ by means of X-ray diffraction, high resolution transmission electron microscopy, electron energy loss spectroscopy, and infrared spectroscopy. The preparation method allows for the adjustment of the mean particle diameter in the range 6 nm < or = dPM < or = 11 nm by controlling the precursor concentration, gas pressure, and microwave power. Spectroscopic investigations reveal that the particles are single crystal silicon. The potential on n- or p-type doping is in progress.
报道了在低压流动反应器中通过微波诱导硅烷分解形成纯单晶硅纳米颗粒。通过颗粒质谱（PMS）原位表征颗粒的形态和晶体结构，并通过X射线衍射、高分辨率透射电子显微镜、电子能量损失谱和红外光谱进行非原位表征。该制备方法可通过控制前驱体浓度、气压和微波功率，将平均粒径调整在6nm≤dPM≤11nm范围内。光谱研究表明这些颗粒是单晶硅。n型或p型掺杂的研究正在进行中。
