Sandoz Patrick
Département d'Optique P.M. Duffieux Institut Franche-Comté Electronique, Mécanique, Thermique et Optique-Sciences et Technologies, Universite de Franche-Comté, F25030 Besançon Cedex, France.
Appl Opt. 2005 Mar 10;44(8):1449-53. doi: 10.1364/ao.44.001449.
A method is presented for position and displacement measurements of the six degrees of freedom by use of a patterned surface element observed by a static interferometric vision system. The surface element is made of a regular pattern of circular holes etched on a chromium layer deposited onto a flat glass plate. The in-plane coordinates (x, y, theta(z)) are reconstructed with a subpixel resolution by a vision method based on phase measurements. The out-of-plane coordinates (z, theta(x), theta(y)) are reconstructed by phase-shifting interferometry. Resolutions achieved by the proposed method are in the range of microradians for the measurement of angles and of nanometers for the position and displacement.
提出了一种通过使用由静态干涉视觉系统观察的图案化表面元件来测量六个自由度的位置和位移的方法。该表面元件由蚀刻在沉积在平板玻璃板上的铬层上的规则圆形孔图案制成。通过基于相位测量的视觉方法以亚像素分辨率重建平面内坐标（x，y，θ(z)）。通过相移干涉测量法重建平面外坐标（z，θ(x)，θ(y)）。所提出的方法实现的分辨率在用于角度测量的微弧度范围内以及用于位置和位移测量的纳米范围内。
