基于光栅外差干涉测量法的三自由度位移测量

Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry.

作者信息

Hsieh Hung-Lin, Pan Ssu-Wen

出版信息

Appl Opt. 2013 Sep 20;52(27):6840-8. doi: 10.1364/AO.52.006840.

DOI:10.1364/AO.52.006840

Abstract

A heterodyne grating-based interferometer for three-degree-of-freedom (3-DOF) displacement measurement is proposed. This technique has the merits of both heterodyne interferometry and grating interferometry. A heterodyne light beam is obtained using an electro-optic modulating technique for amplitude modulation. While the heterodyne light beam is normally incident into a transmission-type 2D grating, two detection parts for in-plane and out-of-plane displacement measurements will be obtained. The heterodyne light beam is utilized to carry the optical phase variation that results from grating displacement in three directions. The experimental results demonstrate that the proposed interferometer is capable of sensing the displacement of a motion stage in 3-DOF. The resolution and range of the measurement can achieve up to nanometric and millimetric levels.

摘要

提出了一种基于外差光栅的三自由度（3-DOF）位移测量干涉仪。该技术兼具外差干涉测量法和光栅干涉测量法的优点。利用电光调制技术进行幅度调制来获得外差光束。当外差光束垂直入射到透射型二维光栅时，将获得用于面内和面外位移测量的两个检测部分。外差光束用于承载由光栅在三个方向上的位移引起的光学相位变化。实验结果表明，所提出的干涉仪能够感测运动平台在三自由度下的位移。测量的分辨率和范围可分别达到纳米级和毫米级。