Kim Chongho, Park Jong Bae, Jee Hae-Geun, Lee Soon Bo, Boo Jin-Hyo, Kim Seong Kyu, Yoo Ji-Beom, Lee Jin Seung, Lee Haeseong
Department of Chemistry, Sungkyunkwan University, Suwon 440-746, Korea
J Nanosci Nanotechnol. 2005 Feb;5(2):306-12. doi: 10.1166/jnn.2005.033.
We report a new method to produce ordered arrays of metal nanostructures on substrates. The method employs a through-hole nanoporous alumina membrane as a mask that is attached onto the substrate, silicon in this study. The material of deposition, Au in this study, was provided by pulsed laser ablation of a target gold. At an early stage of the deposition, a significant portion of Au penetrated the alumina through-holes and formed an ordered nanodot array on the silicon surface. At the later stage, the through-hole deposition was blocked by the growth of Au film on the top surface of the alumina, so that the heights of the Au nanodots were limited to about 10 nm under current experimental conditions. Subsequent attempts to clean up the top surface of the alumina with a lower power laser illumination resulted in the formation of new nanostructures around the alumina pores, nanospheres, or nanorings, depending on the fluence of the laser and the duration of the cleanup. We will discuss the underlying mechanism of the formation of these nanostructures.
我们报道了一种在基底上制备有序金属纳米结构阵列的新方法。该方法采用通孔纳米多孔氧化铝膜作为附着在基底（本研究中为硅）上的掩膜。沉积材料（本研究中为金）由脉冲激光烧蚀金靶提供。在沉积早期，相当一部分金穿过氧化铝通孔并在硅表面形成有序的纳米点阵列。在后期，由于氧化铝顶表面金膜的生长，通孔沉积被阻断，因此在当前实验条件下金纳米点的高度被限制在约10纳米。随后尝试用较低功率的激光照射清理氧化铝顶表面，结果根据激光能量密度和清理持续时间，在氧化铝孔周围形成了新的纳米结构，即纳米球或纳米环。我们将讨论这些纳米结构形成的潜在机制。
