Persaud A, Park S J, Liddle J A, Schenkel T, Bokor J, Rangelow I W
E. O. Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
Nano Lett. 2005 Jun;5(6):1087-91. doi: 10.1021/nl0506103.
We report the integration of a scanning force microscope with ion beams. The scanning probe images surface structures non-invasively and aligns the ion beam to regions of interest. The ion beam is transported through a hole in the scanning probe tip. Piezoresistive force sensors allow placement of micromachined cantilevers close to the ion beam lens. Scanning probe imaging and alignment is demonstrated in a vacuum chamber coupled to the ion beam line. Dot arrays are formed by ion implantation in resist layers on silicon samples with dot diameters limited by the hole size in the probe tips of a few hundred nm.
我们报告了扫描力显微镜与离子束的集成。扫描探针以非侵入方式对表面结构进行成像，并将离子束对准感兴趣的区域。离子束通过扫描探针尖端的一个孔传输。压阻式力传感器可将微机械悬臂放置在靠近离子束透镜的位置。在与离子束线相连的真空室内演示了扫描探针成像和对准。通过在硅样品上的抗蚀剂层中进行离子注入形成点阵列，点直径受几百纳米探针尖端孔尺寸的限制。
