King Gavin M, Schürmann Gregor, Branton Daniel, Golovchenko Jene A
Department of Physics, Harvard University, Cambridge, Massachusetts 02138, USA.
Nano Lett. 2005 Jun;5(6):1157-60. doi: 10.1021/nl050405n.
Nanostructures can be patterned with focused electron or ion beams in thin, stable, conformal films of water ice grown on silicon. We use these patterns to reliably fabricate sub-20 nm wide metal lines and exceptionally well-defined, sub-10 nanometer beam-induced chemical surface transformations. We argue more generally that solid-phase condensed gases of low sublimation energy are ideal materials for nanoscale patterning, and water, quite remarkably, may be among the most useful.
纳米结构可以通过聚焦电子束或离子束在生长于硅上的薄而稳定的保形水冰薄膜中进行图案化。我们利用这些图案可靠地制造出宽度小于20纳米的金属线以及定义极为清晰的、小于10纳米的束诱导化学表面转变。我们更普遍地认为,低升华能的固相凝聚气体是纳米级图案化的理想材料,而非常引人注目的是,水可能是最有用的材料之一。