Zhang Jie, Iwata Koichi, Shibuya Atsushi, Kikuta Hisao, Park Choong Sik
Department of Mechanical Systems Engineering, Graduate School of Engineering, Osaka Prefecture University, 1-1, Gakuen-cho, Sakai, Osaka 599-8531, Japan.
Appl Opt. 2006 Feb 1;45(4):605-10. doi: 10.1364/ao.45.000605.
A multidirectional interferometer system has been proposed and developed to measure the position and orientation of a positioning stage. In this method the system parameters, such as positions of the corner-cube reflectors and directions of the rays in the interferometers, must be determined beforehand. However, it is difficult to find ways to determine the system parameters for each different system with necessary accuracy. This paper proposes a systematic method for calibrating the system parameters when the number of the interferometers is larger than the degrees of freedom of the stage. The method is verified for a two-dimensional stage by both simulation and experiment.
已提出并开发了一种用于测量定位平台位置和取向的多向干涉仪系统。在这种方法中，系统参数，如角锥棱镜反射镜的位置和干涉仪中光线的方向，必须预先确定。然而，很难找到以必要精度确定每个不同系统的系统参数的方法。本文提出了一种当干涉仪数量大于平台自由度时校准系统参数的系统方法。通过模拟和实验对二维平台验证了该方法。
