Nakamura O, Goto M
Appl Opt. 1994 Jan 1;33(1):31-6. doi: 10.1364/AO.33.000031.
We propose a new method for calibrating the three-dimensional (3-D) behavior of a scanning stage. Four laser interferometers are used to determine the position of the corner point of a corner mirror attached to the stage. We calculated the 3-D coordinate of the corner point by using only the length information given by the four laser interferometers; thus a method is realized that is traceable from the practical definition of length and that facilitates the optical alignment that is necessary for the interferometers. We calibrated a commercial 3-D stage by the proposed method with a coordinate accuracy of 20-30 nm.
我们提出了一种用于校准扫描台三维（3-D）行为的新方法。使用四个激光干涉仪来确定附着在扫描台上的角镜角点的位置。我们仅通过四个激光干涉仪给出的长度信息来计算角点的三维坐标；从而实现了一种从长度的实际定义可追溯且便于干涉仪所需光学对准的方法。我们用所提出的方法对一个商用三维扫描台进行了校准，坐标精度达到20 - 30纳米。
