Mrozek Piotr, Mrozek Ewa, Lukaszewicz Tadeusz
Department of Physics, Technical University of Bialystok, Wiejska 45 A, 15-351 Bialystok, Poland.
Appl Opt. 2006 Feb 1;45(4):619-25. doi: 10.1364/ao.45.000619.
A space-charge buildup under the blocking mask in a field-assisted Ag+ -Na+ ion-exchange modeling is assumed. It results in the distortion of electric field lines in the direction under the mask edges. As a result, side diffusion occurs and the numerical model shows the same range of side diffusion as the experimental data. Explicit consideration of the space-charge buildup under the mask and solving the Poisson equation for the electric field determination make it possible to use more realistic boundary conditions in the numerical model, compared to the boundary conditions generally used.
假定在电场辅助的Ag⁺-Na⁺离子交换建模中，阻挡掩膜下会出现空间电荷积累。这会导致掩膜边缘下方方向的电场线发生畸变。结果发生侧向扩散，并且数值模型显示出与实验数据相同的侧向扩散范围。与通常使用的边界条件相比，明确考虑掩膜下的空间电荷积累并求解用于确定电场的泊松方程，使得在数值模型中能够使用更符合实际的边界条件。
