Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances.

作者信息

Cimma Bernard, Forest Danièle, Ganau Patrick, Lagrange Bernard, Mackowski Jean-Marie, Michel Christophe, Montorio Jean-Luc, Morgado Nazario, Pignard Renée, Pinard Laurent, Remillieux Alban

机构信息

Laboratoire des Matériaux Avancés, Université Clande Bernard Lyon I, 22 Boulevard Niels Bohr, 69622 Villeurbanne Cedex, France.

出版信息

Appl Opt. 2006 Mar 1;45(7):1436-9. doi: 10.1364/ao.45.001436.

DOI:10.1364/ao.45.001436

PMID:16539246

Abstract

Large mirrors (ø350 mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.

摘要