Michels Alexandre F, Menegotto Thiago, Grieneisen Hans Peter H, Susin Maurício B, Horowitz Flavio
Instituto de Física, Universidade Federal do Rio Grande do Sul, Campus do Vale, Caixa Postal 15051, 91501-970 Porto Alegre, RS, Brasil.
Appl Opt. 2006 Mar 1;45(7):1491-4. doi: 10.1364/ao.45.001491.
A brief overview of optical monitoring for vacuum and wet-bench film-deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous monitoring of refractive index and physical thickness in real time. Monitoring stability and accuracy are verified during dip coating with a transparent oil standard. This double optical technique is applied to dip coating with a multicomponent zirconyl chloride aqueous solution, whose resulting temporal refractive-index and physical-thickness curves indicate good reproducibility as well as significant sensitivity to changes of film-flow properties during the dip-coating process.
本文简要概述了用于真空和湿法台镀膜工艺的光学监测。干涉测量和偏振测量相结合,可实时同时监测折射率和物理厚度。在用透明油标准品进行浸涂过程中,验证了监测的稳定性和准确性。这种双重光学技术应用于用多组分氯化锆水溶液进行浸涂,其所得的时间折射率和物理厚度曲线显示出良好的重现性,以及对浸涂过程中膜流动特性变化的显著敏感性。