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通过光刻胶薄膜热解制备光学透明碳电极:单分子光谱电化学方法

Fabrication of optically transparent carbon electrodes by the pyrolysis of photoresist films: approach to single-molecule spectroelectrochemistry.

作者信息

Donner Sebastian, Li Hung-Wing, Yeung Edward S, Porter Marc D

机构信息

Ames Laboratory-U.S.D.O.E., Departments of Chemistry and of Chemical and Biological Engineering, and Institute for Combinatorial Discovery, Iowa State University, Ames, Iowa 50011, USA.

出版信息

Anal Chem. 2006 Apr 15;78(8):2816-22. doi: 10.1021/ac052244d.

Abstract

This paper describes the preparation, physical and chemical characterization, and performance of carbon-based optically transparent electrodes (C-OTEs) fabricated by the pyrolysis of thin films of photoresist. The electrodes are prepared by spin coating dilute solutions of the positive photoresist AZ 4330 onto quartz substrates. Pyrolysis of these samples at 1000 degrees C in a reducing atmosphere yields optically transparent carbon films that have thicknesses ranging between 10 and 80 nm. Sheet resistance measurements, X-ray photoelectron spectroscopy, Raman spectroscopy, and atomic force microscopy were used to determine the physical and chemical properties of the films, and cyclic voltammetry and chronoabsorptometry were employed to delineate the electrochemical and conventional spectroelectrochemical performance of the C-OTEs. These findings showed that the transparency of this material improves as film thickness decreases, but at the expense of an increase in film resistance. At a wavelength of 500 nm, for example, 13- and 79-nm-thick films have transparencies of 47 and 10% and sheet resistances of 1100 and 210 Omega/ square, respectively. Importantly, adjusting the dilution factor allows the facile and reproducible variation of thickness and transparency. Preliminary results using these C-OTEs for single-molecule spectroelectrochemistry, which represents a new development in the merger of optical and electrochemical techniques, by probing the potential dependence of the adsorption of individual YOYO-I-labeled lambda-DNA are also presented.

摘要

本文描述了通过光刻胶薄膜热解制备的碳基光学透明电极(C-OTEs)的制备、物理化学表征及性能。这些电极是通过将正性光刻胶AZ 4330的稀溶液旋涂到石英衬底上制备的。在还原气氛中于1000℃对这些样品进行热解,得到厚度在10至80nm之间的光学透明碳膜。使用表面电阻测量、X射线光电子能谱、拉曼光谱和原子力显微镜来确定薄膜的物理和化学性质,并采用循环伏安法和计时吸收法来描述C-OTEs的电化学和传统光谱电化学性能。这些发现表明,这种材料的透明度随着薄膜厚度的减小而提高,但代价是薄膜电阻增加。例如,在500nm波长下,13nm和79nm厚的薄膜透明度分别为47%和10%,表面电阻分别为1100Ω/□和210Ω/□。重要的是,调整稀释因子可以方便且可重复地改变厚度和透明度。还展示了使用这些C-OTEs进行单分子光谱电化学的初步结果,通过探测单个YOYO-I标记的λ-DNA吸附的电位依赖性,这代表了光学和电化学技术融合的新进展。

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