Arieli Yoel, Epshtein Shlomi, Yakubov Igor, Weitzman Yosi, Locketz Garrett, Harris Alon
Opt Express. 2014 Jun 30;22(13):15632-8. doi: 10.1364/OE.22.015632.
A novel method of common-path imaging interferometry, the White Light Spatial-Phase-Shift (WLSPS) for object surface measurements, is discussed here. Compared to standard White Light Interferometry (WLI), which uses a reference mirror, the interferometry of WLSPS is obtained by creating manipulations to the light wavefront reflected from an object's surface. Using this approach, surface measurements can be obtained from any real object image, and do not need to be taken directly from the object itself. This creates the ability for a surface measurement tool to be attached to any optical system that generates a real image of an object. Further, as this method does not require a reference beam, the surface measurement system contains inherent vibration cancelation.
本文讨论了一种用于物体表面测量的共光路成像干涉测量新方法——白光空间相移（WLSPS）。与使用参考镜的标准白光干涉测量法（WLI）相比，WLSPS的干涉测量是通过对从物体表面反射的光波前进行操作来实现的。采用这种方法，可以从任何真实物体图像中获得表面测量结果，而无需直接从物体本身获取。这使得表面测量工具能够附着在任何生成物体真实图像的光学系统上。此外，由于该方法不需要参考光束，表面测量系统具有固有的振动消除功能。
