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内能和碰撞角对非晶氢化碳薄膜生长中活性自由基粘附行为的影响:一项分子动力学研究

Influence of internal energy and impact angle on the sticking behaviour of reactive radicals in thin a-C:H film growth: a molecular dynamics study.

作者信息

Neyts E, Bogaerts A

机构信息

University of Antwerp, Department of Chemistry, Research group PLASMANT, Universiteitsplein 1, 2610, Antwerp, Belgium.

出版信息

Phys Chem Chem Phys. 2006 May 7;8(17):2066-71. doi: 10.1039/b517563a. Epub 2006 Mar 20.

DOI:10.1039/b517563a
PMID:16633695
Abstract

In this molecular dynamics study, we investigate the influence of the internal energy and the impact angle on the sticking coefficients of several hydrocarbon radicals on a hydrogenated amorphous carbon surface. The selected radical species and their kinetic energy were determined experimentally. However, no information is available regarding their internal energy, nor on their impact angles. It is shown that the internal energy has a considerable influence on the sticking coefficient, which is dependent on the kind of species. The impact angle, however, is shown to be of minor importance.

摘要

在这项分子动力学研究中,我们研究了内能和碰撞角对几种烃基在氢化非晶碳表面的 sticking 系数的影响。所选自由基种类及其动能是通过实验确定的。然而,关于它们的内能以及碰撞角,尚无可用信息。结果表明,内能对 sticking 系数有相当大的影响,且该影响取决于物种的种类。然而,碰撞角的影响较小。

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