用于轮廓测量和层析成像的基于频率梳的干涉仪。

Frequency-comb-based interferometer for profilometry and tomography.

作者信息

Choi Samuel, Yamamoto Mitsufumi, Moteki Daisuke, Shioda Tatsutoshi, Tanaka Yosuke, Kurokawa Takashi

机构信息

Department of Technology, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo, Japan.

出版信息

Opt Lett. 2006 Jul 1;31(13):1976-8. doi: 10.1364/ol.31.001976.

DOI:10.1364/ol.31.001976

PMID:16770404

Abstract

A novel interferometry technique using a frequency-comb light source is proposed for surface profilometry and tomography of discontinuous objects. Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0 mm are successfully measured by use of the scheme with 9 mum accuracy.

摘要

提出了一种使用频率梳状光源的新型干涉测量技术，用于不连续物体的表面轮廓测量和层析成像。通过扫描梳状间隔频率而无需机械扫描来进行表面轮廓测量。利用该方案成功测量了0.5毫米和1.0毫米的台阶高度，精度为9微米。