Spijksma Gerald I, Bouwmeester Henny J M, Blank Dave H A, Fischer Andreas, Henry Marc, Kessler Vadim G
Inorganic Materials Science, Faculty of Science & Technology, and Mesa Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands.
Inorg Chem. 2006 Jun 26;45(13):4938-50. doi: 10.1021/ic051674j.
The modification of different zirconium propoxide and hafnium propoxide precursors with 2,2,6,6,-tetramethyl-3,5-heptanedione (Hthd) was investigated by characterization of the isolated modified species. The complexes Zr(OnPr)3(thd), [Zr(OnPr)(OiPr)2(thd)]2, Zr(OiPr)(thd)3, [Hf(OnPr)3(thd)]2, and Hf(OiPr)(thd)3 were isolated and characterized. The structure of the n-propoxide analogue of Zr(OiPr)(thd)3 could not be refined, but its existence was clearly demonstrated by XRD and 1H NMR. The modification of the propoxide precursors involves mono- and trisubstituted intermediate compounds and does not involve a disubstituted compound; thus, the commercial product that is claimed to be "Zr(OiPr)2(thd)2" and is most commonly used for the MOCVD preparation of ZrO2 does not exist. No evidence was found for the presence of such a compound in either zirconium- or hafnium-based systems. Formation of the dimeric hydroxo-di-thd-substituted complex, [Hf(OH)(OiPr)(thd)2]2, which could be isolated only for hafnium-based systems, occurs on microhydrolysis. All heteroleptic intermediates are eventually transformed to the thermodynamically stable Zr(thd)4 or Hf(thd)4) The compounds obtained from isopropoxide precursors showed a higher stability than those with n-propoxide ligands or a combination of both types. In addition, it is important to note that residual alcohol facilitates the transformation and strongly enhances its rate. The unusually low solubility and volatility of MIV(thd)4 has been shown to be due to close packing and strong van der Waals interactions in the crystal structures of these compounds.
通过对分离出的改性物种进行表征,研究了用2,2,6,6 - 四甲基 - 3,5 - 庚二酮(Hthd)对不同的丙醇锆和丙醇铪前驱体进行的改性。分离并表征了配合物Zr(OnPr)3(thd)、[Zr(OnPr)(OiPr)2(thd)]2、Zr(OiPr)(thd)3、[Hf(OnPr)3(thd)]2和Hf(OiPr)(thd)3。Zr(OiPr)(thd)3的正丙醇类似物的结构无法精修,但XRD和1H NMR清楚地证明了其存在。丙醇前驱体的改性涉及单取代和三取代的中间化合物,不涉及二取代化合物;因此,声称是“Zr(OiPr)2(thd)2”且最常用于MOCVD制备ZrO2的商业产品并不存在。在锆基或铪基体系中均未发现存在这种化合物的证据。仅在铪基体系中可分离得到的二聚羟基 - 二 - thd - 取代配合物[Hf(OH)(OiPr)(thd)2]2在微水解时形成。所有杂配中间体最终都会转化为热力学稳定的Zr(thd)4或Hf(thd)4。由异丙醇前驱体制备的化合物比具有正丙醇配体或两者组合的化合物具有更高的稳定性。此外,需要注意的是,残留的醇促进了转化并强烈提高了其速率。已表明MIV(thd)4异常低的溶解度和挥发性是由于这些化合物晶体结构中的紧密堆积和强范德华相互作用。