Krause Holger, Mönch Wolfgang, Zappe Hans
Laboratory for Micro-optics, Department of Microsystems Engineering-IMTEK, University of Freiburg, Freiburg, Germany.
Appl Opt. 2006 Jul 10;45(20):4843-9. doi: 10.1364/ao.45.004843.
A replication process for the fabrication of refractive microlenses from a purely inorganic solgel material based on tetraethoxysilane is presented. The geometrical dimensions and optical properties of the inorganic microlenses are characterized and compared with those of microlenses replicated in a hybrid xerogel containing organic additives. By a reduced solvent content in the sol composition, together with modifications in the replication process, it was possible to obtain inorganic xerogel lenses with exceptionally high sagittal height values of as much as 28 microm. Compared with the hybrid xerogel, the inorganic xerogel has the advantage of an absorption coefficient that is five times lower in the visible spectral range and exhibits optical transparency in the near-ultraviolet range for wavelengths down to 200 nm.
本文介绍了一种基于四乙氧基硅烷的纯无机溶胶-凝胶材料制造折射微透镜的复制工艺。对无机微透镜的几何尺寸和光学特性进行了表征，并与在含有有机添加剂的混合干凝胶中复制的微透镜进行了比较。通过降低溶胶组合物中的溶剂含量，并对复制工艺进行改进，可以获得矢高值高达28微米的无机干凝胶透镜。与混合干凝胶相比，无机干凝胶的优势在于其在可见光谱范围内的吸收系数低五倍，并且在近紫外光谱范围内对低至200纳米的波长表现出光学透明性。
