Instituto de Microelectrónica de Barcelona IMB-CNM (CSIC), Campus UAB, 08193, Bellaterra, Barcelona, Spain.
ACS Appl Mater Interfaces. 2012 Sep 26;4(9):5029-37. doi: 10.1021/am3014696. Epub 2012 Sep 17.
The one-step room-temperature micropatterning of a fluorophore-doped xerogel material on silicon oxide substrates is reported. The organo-alkoxysilane precursors and organic fluorescent dyes, as well as the polymerization experimental conditions, were tailored in order to obtain a highly homogeneous transparent material suitable for photonic applications. A thorough structural characterization was carried out by Fourier transform infrared (FT-IR) spectroscopy, (29)Si nuclear magnetic resonance ((29)Si NMR), thermogravimetric analysis (TGA), N(2) adsorption Brunauer-Emmett-Teller (BET) porosimetry, and confocal microscopy. These studies revealed a stable nonporous highly cross-linked polymer network containing evenly dispersed fluorescent molecules. Xerogel microstructures having thicknesses between 4 and 80 μm and height-to-width ratios between 0.04 and 4, as well as showing different geometries, from well arrays to waveguides, were patterned in a single step by micromolding in capillaries (MIMIC) soft lithographic technique. The reliability of the replication process was tested by bright-field optical microscopy and scanning electron microscopy (SEM) that show the close fidelity of the microstructures to the applied mold. The optical performance of the developed material was demonstrated by fabricating waveguides and evaluating their corresponding spectral response, obtaining absorption bands, at the expected excitation wavelengths of the corresponding fluorescent dyes and gain due to photonic re-emission (fluorescence) at their corresponding dye emission wavelengths. The hybrid xerogel material and the application of the simple fabrication technology presented herein can be directly applied to the development of cost-effective photonic components, as could be light emitters, to be readily integrated in single-use lab-on-chip devices and other polymeric microsystems.
报道了一种在氧化硅衬底上一步室温微图案化的荧光掺杂气凝胶材料。为了获得适用于光子应用的高度均匀透明材料,对有机烷氧基硅烷前体和有机荧光染料以及聚合实验条件进行了定制。通过傅里叶变换红外(FT-IR)光谱、(29)Si 核磁共振((29)Si NMR)、热重分析(TGA)、N2 吸附 Brunauer-Emmett-Teller(BET)比表面积和共焦显微镜对其进行了彻底的结构表征。这些研究表明,该材料具有稳定的无孔、高度交联的聚合物网络,其中均匀分散有荧光分子。通过毛细管微模塑(MIMIC)软光刻技术,在一步工艺中可图案化出厚度在 4 至 80 μm 之间、高宽比在 0.04 至 4 之间的不同几何形状(从孔阵到波导)的气凝胶微结构。通过明场光学显微镜和扫描电子显微镜(SEM)对复制过程的可靠性进行了测试,结果表明微结构与应用模具非常吻合。通过制作波导并评估其相应的光谱响应,展示了所开发材料的光学性能,在相应荧光染料的预期激发波长处获得了吸收带,并在其相应染料发射波长处获得了由于光子再发射(荧光)而产生的增益。这种混合气凝胶材料和本文提出的简单制造技术的应用可直接应用于开发具有成本效益的光子元件,例如发光体,以便于集成在一次性微流控芯片设备和其他聚合物微系统中。