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Paraxial speckle-based metrology systems with an aperture.

作者信息

Kelly Damien P, Ward Jennifer E, Hennelly Bryan M, Gopinathan Unnikrishnan, O'Neill Feidhlim T, Sheridan John T

机构信息

School of Electrical, Electronic and Mechanical Engineering, College of Engineering, Mathematical and Physical Sciences, University College Dublin, Belfield, Dublin 4, Ireland.

出版信息

J Opt Soc Am A Opt Image Sci Vis. 2006 Nov;23(11):2861-70. doi: 10.1364/josaa.23.002861.

DOI:10.1364/josaa.23.002861
PMID:17047714
Abstract

Digital speckle photography can be used in the analysis of surface motion in combination with an optical linear canonical transform (LCT). Previously [D. P. Kelly et al. Appl. Opt.44, 2720 (2005)] it has been shown that optical fractional Fourier transforms (OFRTs) can be used to vary the range and sensitivity of speckle-based metrology systems, allowing the measurement of both the magnitude and direction of tilting (rotation) and translation motion simultaneously, provided that the motion is captured in two separate OFRT domains. This requires two bulk optical systems. We extend the OFRT analysis to more general LCT systems with a single limiting aperture. The effect of a limiting aperture in LCT systems is examined in more detail by deriving a generalized Yamaguchi correlation factor. We demonstrate the benefits of using an LCT approach to metrology design. Using this technique, we show that by varying the curvature of the illuminating field, we can effectively change the output domain. From a practical perspective this means that estimation of the motion of a target can be achieved by using one bulk optical system and different illuminating conditions. Experimental results are provided to support our theoretical analysis.

摘要

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