Walsby E D, Alton J, Worrall C, Beere H E, Ritchie D A, Cumming D R S
Department of Electronics and Electrical Engineering, University of Glasgow, UK.
Opt Lett. 2007 May 1;32(9):1141-3. doi: 10.1364/ol.32.001141.
Terahertz diffractive optic elements have been fabricated in polypropylene by imprinting with a silicon master. A silicon master is created with eight phase levels for high diffraction efficiency and etched using inductively coupled plasma reactive ion etching. This technique enables the rapid replication of complex optical structures in a high transmission material. Excellent replication of multilevel high efficiency Fresnel lenses is shown. The resulting lenses were tested with a 2 THz quantum cascade laser. The signal strength at the focus was 70 times the base signal strength.
太赫兹衍射光学元件已通过用硅母版压印在聚丙烯中制造出来。使用感应耦合等离子体反应离子蚀刻法制作了具有八个相位级别的硅母版，以实现高衍射效率。该技术能够在高透射率材料中快速复制复杂的光学结构。展示了多级高效菲涅耳透镜的出色复制效果。用2太赫兹量子级联激光器对所得透镜进行了测试。焦点处的信号强度是基准信号强度的70倍。
