Lysenkov Dmitry, Engstler Jörg, Dangwal Arti, Popp Alexander, Müller Günter, Schneider Jörg J, Janardhanan Vinod M, Deutschmann Olaf, Strauch Peter, Ebert Volker, Wolfrum Jürgen
Bergische Universität Wuppertal, Fachbereich C Abt. Physik, 42097 Wuppertal, Germany.
Small. 2007 Jun;3(6):974-85. doi: 10.1002/smll.200600595.
We have developed a chemical vapor deposition (CVD) process for the catalytic growth of carbon nanotubes (CNTs), anchored in a comose-type structure on top of porous alumina substrates. The mass-flow conditions of precursor and carrier gases and temperature distributions in the CVD reactor were studied by transient computational fluid dynamic simulation. Molecular-beam quadrupole mass spectroscopy (MB-QMS) has been used to analyze the gas phase during ferrocene CVD under reaction conditions (1073 K) in the boundary layer near the substrate. Field-emission (FE) properties of the nonaligned CNTs were measured for various coverages and pore diameters of the alumina. Samples with more dense CNT populations provided emitter-number densities up to 48,000 cm(-2) at an electric field of 6 V microm(-1). Samples with fewer but well-anchored CNTs in 22-nm pores yielded the highest current densities. Up to 83 mA cm(-2) at 7 V microm(-1) in dc mode and more than 200 mA cm(-2) at 11 V microm(-1) in pulsed diode operation have been achieved from a cathode size of 24 mm2.
我们开发了一种化学气相沉积(CVD)工艺,用于在多孔氧化铝基板顶部以丛生型结构催化生长碳纳米管(CNT)。通过瞬态计算流体动力学模拟研究了CVD反应器中前驱体气体和载气的质量流条件以及温度分布。分子束四极质谱(MB-QMS)已用于分析在反应条件(1073 K)下基板附近边界层中进行二茂铁CVD时的气相。针对氧化铝的各种覆盖率和孔径测量了未排列的CNT的场发射(FE)特性。具有更密集CNT群体的样品在6 V μm⁻¹的电场下提供了高达48,000 cm⁻²的发射体数密度。在22 nm孔径中具有较少但锚固良好的CNT的样品产生了最高的电流密度。从24 mm²的阴极尺寸在直流模式下7 V μm⁻¹时达到了高达83 mA cm⁻²,在脉冲二极管操作中11 V μm⁻¹时超过了200 mA cm⁻²。