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一种用于玻璃微通道快速成型的调色剂介导光刻技术。

A toner-mediated lithographic technology for rapid prototyping of glass microchannels.

作者信息

Coltro Wendell Karlos Tomazelli, Piccin Evandro, Fracassi da Silva José Alberto, Lucio do Lago Claudimir, Carrilho Emanuel

机构信息

Instituto de Química de São Carlos, Universidade de São Paulo, Avenida Trabalhador SãoCarlense 400, P.O. Box 780, 13566-590, São Carlos-SP, Brazil.

出版信息

Lab Chip. 2007 Jul;7(7):931-4. doi: 10.1039/b702931d. Epub 2007 Jun 5.

Abstract

A simple, fast, and inexpensive masking technology without any photolithographic step to produce glass microchannels is proposed in this work. This innovative process is based on the use of toner layers as mask for wet chemical etching. The layouts were projected in graphic software and printed on wax paper using a laser printer. The toner layer was thermally transferred from the paper to cleaned glass surfaces (microscope slides) at 130 degrees C for 2 min. After thermal transference, the glass channel was etched using 25% (v/v) hydrofluoric acid (HF) solution. The toner mask was then removed by cotton soaked in acetonitrile. The etching rate was approximately 7.1 +/- 0.6 microm min(-1). This process is economically more attractive than conventional methods because it does not require any sophisticated instrumentation and it can be implemented in any chemical/biochemical laboratory. The glass channel was thermally bonded against a flat glass cover and its analytical feasibility was investigated using capacitively coupled contactless conductivity detection (C(4)D) and laser-induced fluorescence (LIF) detection.

摘要

本工作提出了一种简单、快速且廉价的掩膜技术,无需任何光刻步骤即可制造玻璃微通道。这种创新工艺基于使用墨粉层作为湿法化学蚀刻的掩膜。布局在图形软件中设计,并使用激光打印机打印在蜡纸上。墨粉层在130摄氏度下热转印2分钟,从纸张转移到清洁后的玻璃表面(显微镜载玻片)。热转印后,使用25%(v/v)氢氟酸(HF)溶液蚀刻玻璃通道。然后用浸有乙腈的棉花去除墨粉掩膜。蚀刻速率约为7.1±0.6微米/分钟。该工艺在经济上比传统方法更具吸引力,因为它不需要任何复杂的仪器设备,并且可以在任何化学/生物化学实验室中实施。将玻璃通道与一块平板玻璃盖热键合,并使用电容耦合非接触式电导检测(C(4)D)和激光诱导荧光(LIF)检测研究其分析可行性。

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