New approach for the dynamical simulation of CBED patterns in heavily strained specimens.

A new method for the dynamical simulation of convergent beam electron diffraction (CBED) patterns is proposed. In this method, the three-dimensional stationary Schrödinger equation is replaced by a two-dimensional time-dependent equation, in which the direction of propagation of the electron beam, variable z, stands as a time. We demonstrate that this approach is particularly well-suited for the calculation of the diffracted intensities in the case of a z-dependent crystal potential. The corresponding software has been developed and implemented for simulating CBED patterns of various specimens, from perfect crystals to heavily strained cross-sectional specimens. Evidence is given for the remarkable agreement between simulated and experimental patterns.