Holzapfel C, Soldera F, Faundez E A, Mücklich F
Universität des Saarlandes, Funktionswerkstoffe, Postfach 151150, D-66041 Saarbrücken, Germany.
J Microsc. 2007 Jul;227(Pt 1):42-50. doi: 10.1111/j.1365-2818.2007.01781.x.
A focused ion beam was employed for local target preparation for EBSD analysis. The volume of the ion-solid interaction is well below 50 nm at glancing incidence for metallic and transition metal oxide samples. Therefore, focused ion beam can successfully be used for electron backscatter diffraction (EBSD) sample preparation. The sample investigated consists of Ni covered with a NiO layer of approximately 5 microm thickness. Focused ion beam cross-sectioning of these layers and subsequent electron imaging in addition to EBSD maps shows a bimodal structure of the oxide layer. In order to test the potential of such oxidized samples as electrode materials, single spark erosion experiments were performed. The erosion craters have diameters up to 40 microm and have a depth corresponding to the thickness of the oxide layer. In addition, a deformation zone produced by thermoshock accompanies the formation of the crater. This deformation zone was further investigated by EBSD analysis using a new way of sample preparation employing the focused ion beam technology. This target preparation routine is called Volume of Interest Transfer and has the potential of providing a full three-dimensional characterization.
使用聚焦离子束进行局部靶材制备以用于电子背散射衍射（EBSD）分析。对于金属和过渡金属氧化物样品，在掠入射时离子与固体相互作用的体积远低于50纳米。因此，聚焦离子束可成功用于电子背散射衍射（EBSD）样品制备。所研究的样品由覆盖有厚度约为5微米的NiO层的Ni组成。对这些层进行聚焦离子束横截面分析，并在进行EBSD映射的同时进行后续电子成像，结果显示了氧化层的双峰结构。为了测试此类氧化样品作为电极材料的潜力，进行了单火花腐蚀实验。腐蚀坑的直径可达40微米，深度与氧化层的厚度相当。此外，热冲击产生的变形区伴随着坑的形成。使用聚焦离子束技术的一种新的样品制备方法，通过EBSD分析对该变形区进行了进一步研究。这种靶材制备程序称为感兴趣体积转移，具有提供完整三维表征的潜力。
