Heil Joachim, Bauer Tobias, Schmax Stefan, Sure Thomas, Wesner Joachim
Leica Microsystems CMS GmbH, Ernst-Leitz-Strasse 17-37, D-35578 Wetzlar, Germany.
Appl Opt. 2007 Aug 1;46(22):5282-92. doi: 10.1364/ao.46.005282.
The interpretation of Fizeau interferograms of optical flats is not straightforward because they are composed of more than two reflections. This results in a confusing fringe pattern. There are three main contributions to the interferogram given by the reflections from the reference surface, the front and the rear surface of the sample. We present a new to the best of our knowledge solution to the problem. We use phase shifting measurements of the wave fields, which are reflected by and transmitted through the sample. This eliminates the need for the suppression of reflections by immersion or other methods. As an illustration of this method, several examples will also be presented.
光学平面的斐索干涉图的解读并不简单，因为它们由两个以上的反射组成。这导致条纹图案令人困惑。干涉图主要有三个来源，分别是参考面、样品前表面和后表面的反射。据我们所知，我们提出了一种解决该问题的新方法。我们使用对样品反射和透射的波场进行相移测量。这就无需通过浸没或其他方法来抑制反射。作为该方法的示例，还将给出几个例子。
