Zong Yi, Duan Mingliang, Zhu Rihong, Chen Lei, Li Jianxin
Opt Lett. 2021 May 1;46(9):2051-2054. doi: 10.1364/OL.416939.
The coexistence of anti-vibration and a common optical path is difficult to realize in dynamic Fizeau interferometry. To address this problem, we propose a dynamic low-coherence interferometry (DLI) using a double Fizeau cavity. The DLI method is a new optical model that creatively renders both surfaces of the RM to interfere with the test surface, utilizing a low-coherence source and optical path matching to construct the common-path -polarized Fizeau cavity (-FC) and carrier-frequency -polarized Fizeau cavity (-FC). The relative tilt phases of the -FC are calculated using the carrier frequency interferograms; then the final phase is retrieved with the relative tilt phases and -FC interferograms. The experimental results demonstrate that the DLI method can provide high-precision phase measurement in a vibration environment.
在动态菲佐干涉测量中，抗振与共光路的共存难以实现。为解决这一问题，我们提出了一种使用双菲佐腔的动态低相干干涉测量法（DLI）。DLI方法是一种新的光学模型，它创造性地使参考镜（RM）的两个表面与测试表面发生干涉，利用低相干光源和光路匹配来构建共光路偏振菲佐腔（-FC）和载频偏振菲佐腔（-FC）。利用载频干涉图计算-FC的相对倾斜相位；然后通过相对倾斜相位和-FC干涉图来恢复最终相位。实验结果表明，DLI方法能够在振动环境中提供高精度的相位测量。
