Science. 1988 Feb 5;239(4840):623-5. doi: 10.1126/science.239.4840.623.
Carbon films with a diamondlike structure that are chemically bonded to surfaces have been deposited by means of low-energy C(+) ion beams. When mass-selected C(+) beams at energies in the range from 20 to 200 electron volts impinge on atomically clean surfaces, the first carbon monolayer grows as a carbide structure that is chemically bonded to the surface. As deposition continues, the structure evolves over the next several atomic layers into a diamondlike structure. These pure carbon films are strongly adhered to the surface through the carbide bonds, which also provide for an intimate interface. There are significant applications for such films, particularly as insulators and doped semiconductors.
采用低能 C(+)离子束沉积了化学结合到表面的类金刚石结构的碳膜。当能量在 20 到 200 电子伏特范围内的质量选择的 C(+)束撞击原子清洁表面时，第一层碳以化学结合到表面的碳化物结构生长。随着沉积的继续，在接下来的几个原子层中，结构演变成类金刚石结构。这些纯碳膜通过碳化物键牢固地附着在表面上，这也提供了一个紧密的界面。这种膜具有重要的应用，特别是作为绝缘体和掺杂半导体。
