Nakazawa Marie, Kosugi Tsutomu, Nagatsuka Hiromi, Maezawa Akihiro, Nakamura Kentaro, Ueha Sadayuki
Tokyo Institute of Technology, The Precision and Intelligence Laboratories, Yokahama, Kanagawa, Japan.
IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Oct;54(10):2165-74. doi: 10.1109/tuffc.2007.513.
Ultrasonic transducers using polyurea piezoelectric thin film are studied in this paper. Aromatic polyurea thin films, prepared by vapor deposition polymerization, have useful characteristics for use as an ultrasonic transducer. This paper presents the fabrication and experimental evaluation of ultrasonic transducers formed using polyurea films. First, the vapor deposition polymerization process using two monomers is briefly reviewed, and the temperature conditions for higher piezoelectric constants are explored. Second, in order to test the fundamental characteristics of this material as a high-frequency, ultrasonic transducer, a polyurea film of 2.5 microm thickness was deposited on a silicon substrate. In the pulse/echo experiment results, a resonant frequency of about 100 MHz was observed. Third, we fabricated a concave point focus transducer and a cylindrical line focus transducer. To examine the performances of the focus transducers, two-dimensional images of a coin and V(z) curve measurements for an aluminum surface were demonstrated.
本文研究了使用聚脲压电薄膜的超声换能器。通过气相沉积聚合制备的芳香族聚脲薄膜具有用作超声换能器的有用特性。本文介绍了使用聚脲薄膜形成的超声换能器的制造和实验评估。首先，简要回顾了使用两种单体的气相沉积聚合过程，并探索了具有更高压电常数的温度条件。其次，为了测试这种材料作为高频超声换能器的基本特性，在硅基板上沉积了厚度为2.5微米的聚脲薄膜。在脉冲/回波实验结果中，观察到约100 MHz的共振频率。第三，我们制造了一个凹点聚焦换能器和一个圆柱线聚焦换能器。为了检查聚焦换能器的性能，展示了硬币的二维图像和铝表面的V(z)曲线测量结果。
