Zhang Q Q, Djuth F T, Zhou Q F, Hu C H, Cha J H, Shung K K
Geospace Research Inc., El Segundo, CA 90245, USA.
Ultrasonics. 2006 Dec 22;44 Suppl 1:e711-5. doi: 10.1016/j.ultras.2006.05.130. Epub 2006 Jun 6.
A modified sol-gel method is used to prepare PZT thick film on Pt-coated silicon substrate. A new method of vacuum filling sol-gel precursor solution is introduced to improve film quality. The effects of the filling on PZT thick film structure and ferroelectric properties are discussed. The fabrication of a high frequency transducer with the PZT film as the actuating layer is described. The performance of the transducer is measured and results show that the transducer backed by E-Solder without a matching layer has a center frequency of 103 MHz and a bandwidth of 70%. Beam profile measurements show that the transducer has an axial resolution of 9.2 microm and a lateral resolution of 33 microm.
采用改进的溶胶-凝胶法在镀铂硅衬底上制备PZT厚膜。引入了一种真空填充溶胶-凝胶前驱体溶液的新方法来提高薄膜质量。讨论了填充对PZT厚膜结构和铁电性能的影响。描述了以PZT薄膜为驱动层的高频换能器的制造过程。对换能器的性能进行了测量，结果表明，没有匹配层的以E型焊料为背衬的换能器中心频率为103 MHz，带宽为70%。波束轮廓测量表明，该换能器的轴向分辨率为9.2微米，横向分辨率为33微米。
