Stewart Jason B, Diouf Alioune, Zhou Yaopeng, Bifano Thomas G
Department of Electrical and Computer Engineering, Boston University, Massachusetts 02215, USA.
J Opt Soc Am A Opt Image Sci Vis. 2007 Dec;24(12):3827-33. doi: 10.1364/josaa.24.003827.
A method is introduced for predicting control voltages that will generate a prescribed surface shape on a MEMS deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5 microm amplitudes have been achieved with less than 15 nm rms error.
