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Omega filter installed in the 1MV microscope of Kyushu University.

作者信息

Omoto K, Tsuno K, Ohsaki M, Matsumura S, Tomokiyo Y

机构信息

JEOL Ltd., Akishima, Tokyo 196-8558, Japan.

出版信息

Micron. 2008 Aug;39(6):666-75. doi: 10.1016/j.micron.2007.10.011. Epub 2007 Oct 22.

Abstract

A 1.25MV high-voltage electron microscope with a B-type omega filter has been successfully installed at Kyushu University. An image detection chamber has been set inside a concrete block below the ground level without changing the frame structure for anti-vibration. Nearly the same design as that for the 200kV microscope has been kept for the present omega filter except for its size. A new pre- and post-filter lens system with rotation-free imaging has been designed. Energy resolution, beam shape and stability of the filter have been measured. Some application data have been obtained to demonstrate the performance of the filter.

摘要

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