Omoto K, Tsuno K, Ohsaki M, Matsumura S, Tomokiyo Y
JEOL Ltd., Akishima, Tokyo 196-8558, Japan.
Micron. 2008 Aug;39(6):666-75. doi: 10.1016/j.micron.2007.10.011. Epub 2007 Oct 22.
A 1.25MV high-voltage electron microscope with a B-type omega filter has been successfully installed at Kyushu University. An image detection chamber has been set inside a concrete block below the ground level without changing the frame structure for anti-vibration. Nearly the same design as that for the 200kV microscope has been kept for the present omega filter except for its size. A new pre- and post-filter lens system with rotation-free imaging has been designed. Energy resolution, beam shape and stability of the filter have been measured. Some application data have been obtained to demonstrate the performance of the filter.
