使用回路成形技术对原子力显微镜系统的音圈电机纳米扫描仪进行控制。

Control of voice coil motor nanoscanners for an atomic force microscopy system using a loop shaping technique.

作者信息

Youm Woosub, Jung Jongkyu, Lee Sungq, Park Kyihwan

机构信息

Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Republic of Korea.

出版信息

Rev Sci Instrum. 2008 Jan;79(1):013707. doi: 10.1063/1.2829990.

DOI:10.1063/1.2829990

PMID:18248039

Abstract

The voice coil motor nanoscanner has the advantages of large working range, easy control, and low cost compared to the conventional lead zirconate titanate driven nanoscanner. However, it has a small damping problem which causes mechanical vibration. The mechanical vibration reduces the accuracy as well as servobandwidth, which deteoriates the atomic force microscopy (AFM) image of the samples. In order to solve the vibration problem, the loop shaping technique [for vertical (z)] and input prefilter [for lateral (xy)] are applied. Experimental results of the proposed techniques are presented for vertical (z) and lateral (xy) scanner. Finally, the AFM images are provided to investigate its effect.

摘要

与传统的锆钛酸铅驱动的纳米扫描仪相比，音圈电机纳米扫描仪具有工作范围大、易于控制和成本低的优点。然而，它存在一个小的阻尼问题，会导致机械振动。机械振动会降低精度以及伺服带宽，从而使样品的原子力显微镜（AFM）图像质量下降。为了解决振动问题，应用了环路整形技术[用于垂直方向（z）]和输入预滤波器[用于横向方向（xy）]。给出了所提技术在垂直（z）和横向（xy）扫描仪上的实验结果。最后，提供了AFM图像以研究其效果。