• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

具有粗糙表面的层状结构的散射:偏振光学散射仪测量结果与理论的比较。

Scattering by layered structures with rough surfaces: comparison of polarimetric optical scatterometer measurements with theory.

作者信息

Bahar E, Kubik R D

出版信息

Appl Opt. 1997 May 1;36(13):2956-62. doi: 10.1364/ao.36.002956.

DOI:10.1364/ao.36.002956
PMID:18253299
Abstract

A laboratory model of a layered structure with a rough upper surface (a glass microscope slide cut with a diamond saw) is used to obtain optical polarimetric data. Scatterometer measurements were made of all the Mueller matrix elements associated with light scattered in arbitrary directions. (A preliminary measurement of scattering from a smooth opaque gold film on a silicon wafer was used to validate the calculation of the Mueller matrix elements.) These measurements are compared with corresponding analytical solutions based on the full-wave approach. Physical interpretations of the analytical solutions that account for scattering upon reflection and transmission across rough interfaces are given in a companion paper. The agreement between calculations and measurements suggests that the full wave, polarimetric solutions can provide a reliable database for electromagnetic detection of rough surfaces in remote-sensing applications.

摘要

使用具有粗糙上表面的分层结构的实验室模型(用金刚石锯切割的玻璃显微镜载玻片)来获取光学偏振数据。对与在任意方向散射的光相关的所有穆勒矩阵元素进行散射计测量。(对硅片上光滑不透明金膜的散射进行的初步测量用于验证穆勒矩阵元素的计算。)将这些测量结果与基于全波方法的相应解析解进行比较。在一篇配套论文中给出了考虑粗糙界面反射和透射时散射的解析解的物理解释。计算结果与测量结果之间的一致性表明,全波偏振解可以为遥感应用中粗糙表面的电磁探测提供可靠的数据库。

相似文献

1
Scattering by layered structures with rough surfaces: comparison of polarimetric optical scatterometer measurements with theory.具有粗糙表面的层状结构的散射:偏振光学散射仪测量结果与理论的比较。
Appl Opt. 1997 May 1;36(13):2956-62. doi: 10.1364/ao.36.002956.
2
Computations of the Mueller matrix elements for scattering from layered structures with rough surfaces, with applications to optical detection.具有粗糙表面的分层结构散射的穆勒矩阵元素计算及其在光学检测中的应用。
Appl Opt. 1997 May 1;36(13):2947-55. doi: 10.1364/ao.36.002947.
3
Investigation polarimetric scattering of light from the randomly rough surface based on the calculation of the Mueller matrix.基于穆勒矩阵计算对来自随机粗糙表面的光进行偏振散射研究。
Opt Express. 2023 Jul 17;31(15):24796-24809. doi: 10.1364/OE.492780.
4
Remote sensing of penetrable objects buried beneath two-dimensional random rough surfaces by use of the Mueller matrix elements.利用穆勒矩阵元素对埋于二维随机粗糙表面下的可穿透物体进行遥感探测。
J Opt Soc Am A Opt Image Sci Vis. 2003 Jan;20(1):183-94. doi: 10.1364/josaa.20.000183.
5
Investigation of rough surfaces and transparent birefringent samples with Mueller-matrix scatterometry.用穆勒矩阵散射测量法研究粗糙表面和透明双折射样品。
Appl Opt. 1997 Oct 20;36(30):7621-8. doi: 10.1364/ao.36.007621.
6
Automated high-speed Mueller matrix scatterometer.自动化高速穆勒矩阵散射仪。
Appl Opt. 1997 Aug 1;36(22):5388-95. doi: 10.1364/ao.36.005388.
7
Modeling light scattered from and transmitted through dielectric periodic structures on a substrate.对从衬底上的介电周期结构散射和透射的光进行建模。
Appl Opt. 2007 Mar 1;46(7):1150-6. doi: 10.1364/ao.46.001150.
8
Perturbation Theory for Scattering from Multilayers with Randomly Rough Fractal Interfaces: Remote Sensing Applications.具有随机粗糙分形界面的多层介质散射微扰理论:遥感应用
Sensors (Basel). 2017 Dec 27;18(1):54. doi: 10.3390/s18010054.
9
Use of a novel infrared wavelength-tunable laser Mueller-matrix polarimetric scatterometer to measure nanostructured optical materials.使用新型红外波长可调谐激光穆勒矩阵偏振散射仪测量纳米结构光学材料。
Rev Sci Instrum. 2017 Oct;88(10):103104. doi: 10.1063/1.4990003.
10
Physical optics solution for the scattering of a partially-coherent wave from a statistically rough material surface.从统计粗糙材料表面散射部分相干波的物理光学解决方案。
Opt Express. 2013 Mar 25;21(6):6807-25. doi: 10.1364/OE.21.006807.