Delplancke F
Department of Optics and Acoustics, Université Libre de Bruxelles, 1050 Brussels, Belgium.
Appl Opt. 1997 Aug 1;36(22):5388-95. doi: 10.1364/ao.36.005388.
A new scatterometer-polarimeter is described. It measures the angular distribution of intensity and of the complete Mueller matrix of light scattered by rough surfaces and particle suspensions. The measurement time is 1 s/scattering angle in the present configuration but can be reduced to a few milliseconds with modified electronics. The instrument uses polarization modulation and a Fourier analysis of four detected signals to obtain the 16 Mueller matrix elements. This method is particularly well suited to online, real time, industrial process control involving rough surfaces and large particle suspensions (an arithmetic roughness or particle diameter of >1 microm). Some results are given.
描述了一种新型散射仪-偏振仪。它测量粗糙表面和颗粒悬浮液散射光的强度角分布以及完整的穆勒矩阵。在当前配置下，测量时间为1秒/散射角，但通过改进电子设备可缩短至几毫秒。该仪器采用偏振调制和对四个检测信号进行傅里叶分析来获取16个穆勒矩阵元素。这种方法特别适用于涉及粗糙表面和大颗粒悬浮液（算术粗糙度或颗粒直径大于1微米）的在线、实时工业过程控制。给出了一些结果。
