Delplancke F H
Appl Opt. 1997 Oct 20;36(30):7621-8. doi: 10.1364/ao.36.007621.
Measurements made with an automated angle-resolved Mueller-matrix scatterometer are described. The instrument uses incident-polarization electro-optical modulation, division-of-amplitude photopolarimetry, and software-implemented Fourier-transform analysis of the detected signals to determine the scattered Mueller matrix of the sample. The measurement time is approximately 1 s per scattering angle. Applications to the control of surface roughness and structure on rough steel sheets (galvanized and uncoated) and of the properties of transparent birefringent optical elements (liquid-crystal devices) are discussed.
本文描述了使用自动角度分辨穆勒矩阵散射仪进行的测量。该仪器采用入射偏振电光调制、振幅分割光偏振测量法以及对检测信号进行软件实现的傅里叶变换分析，以确定样品的散射穆勒矩阵。每个散射角的测量时间约为1秒。文中还讨论了该仪器在粗糙钢板（镀锌和未涂层）表面粗糙度和结构控制以及透明双折射光学元件（液晶器件）特性控制方面的应用。
